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2321 lines (2162 loc) · 170 KB
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@article{andersen2002,
title = {Electrical Activity of Carbon-Hydrogen Centers in {{Si}}},
author = {Andersen, O. and Peaker, A. R. and Dobaczewski, L. and Nielsen, K. Bonde and Hourahine, B. and Jones, R. and Briddon, P. R. and {\"O}berg, S.},
year = {2002},
volume = {66},
pages = {235205},
doi = {10.1103/PhysRevB.66.235205},
abstract = {The electrical activity of Cs-H defects in Si has been investigated in a combined modeling and experimental study. High-resolution Laplace capacitance spectroscopy with the uniaxial stress technique has been used to measure the stress-energy tensor and the results are compared with theoretical modeling. At low temperatures, implanted H is trapped as a negative-U center with a donor level in the upper half of the gap. However, at higher temperatures, H migrates closer to the carbon impurity and the donor level falls, crossing the gap. At the same time, an acceptor level is introduced into the upper gap making the defect a positive-U center.},
file = {/home/arch/Zotero/storage/JHI4WP36/2002_Electrical_activity_of.pdf;/home/arch/Zotero/storage/LAXCDSSY/PhysRevB.66.html},
journal = {Physical Review B},
number = {23}
}
@article{asom1987,
title = {Interstitial Defect Reactions in Silicon},
author = {Asom, M. T. and Benton, J. L. and Sauer, R. and Kimerling, L. C.},
year = {1987},
volume = {51},
pages = {256--258},
issn = {0003-6951},
doi = {10.1063/1.98465},
file = {/home/arch/Zotero/storage/BMF6TMVT/1987_Interstitial_defect_reactions.pdf;/home/arch/Zotero/storage/L9ASANCD/1.html},
journal = {Applied Physics Letters},
keywords = {carbon,defects in semiconductors,InDatabase,silicon},
number = {4}
}
@article{astrova1998,
title = {Process Induced Deep-Level Defects in High Purity Silicon},
author = {Astrova, E. V. and Voronkov, V. B. and Kozlov, V. A. and Lebedev, A. A.},
year = {1998},
volume = {13},
pages = {488},
issn = {0268-1242},
doi = {10.1088/0268-1242/13/5/008},
abstract = {Deep-level defects appear in silicon upon heat treatment of wafers with surface disordered by mechanical lapping or introducing high concentration impurity in diffusion layer, i.e. in regimes typical of fabrication of high voltage devices. By means of capacitance transient spectroscopy, combined with other methods, it was shown that dominant electron traps with ionization energies of 0.28 and 0.54 eV of double level donor have low recombination activity, but affect the resistivity of high purity Si and play a key role in limiting the p-n junction breakdown voltage \#\#IMG\#\# [http://ej.iop.org/images/0268-1242/13/5/008/img1.gif] . A careful study of the defect parameters showed their similarity to sulphur-related centres in Si.},
file = {/home/arch/Zotero/storage/3L4L3XMB/1998Process_induced_deep-level.pdf;/home/arch/Zotero/storage/9FYRFRVY/1998Process_induced_deep-level.pdf},
journal = {Semiconductor Science and Technology},
keywords = {complicated,defects in semiconductors,quenching (thermal),sulfur,ToGoInDatabase},
language = {en},
number = {5}
}
@article{baber1987,
title = {Characterization of Silver-related Deep Levels in Silicon},
author = {Baber, N. and Grimmeiss, H. G. and Kleverman, M. and Omling, P. and Iqbal, M. Zafar},
year = {1987},
volume = {62},
pages = {2853--2857},
issn = {0021-8979},
doi = {10.1063/1.339425},
file = {/home/arch/Zotero/storage/U9WFLQQR/1987_Characterization_of.pdf;/home/arch/Zotero/storage/9W4H9KQC/1.html},
journal = {Journal of Applied Physics},
keywords = {DLTS,InDatabase,siliver},
number = {7}
}
@article{bemski1958,
title = {Recombination {{Properties}} of {{Gold}} in {{Silicon}}},
author = {Bemski, G.},
year = {1958},
volume = {111},
pages = {1515--1518},
doi = {10.1103/PhysRev.111.1515},
abstract = {The presence of gold atoms in the silicon lattice decreases the lifetime of excess electrons and holes in p- and n-type material. The capture of electrons in p-type silicon occurs through the gold donor level with a capture cross section, {$\sigma$}n0, of 3.5\texttimes{}10-15 cm2 (at 300\textdegree{}K). This capture cross section varies as T-2.5 between 200\textdegree{} and 500\textdegree{}K. In n-type silicon the electron capture cross section, {$\sigma$}n0, is 5\texttimes{}10-16 cm2 at 300\textdegree{}K and is temperature independent; the hole capture cross section, {$\sigma$}p0, is 1\texttimes{}10-15 cm2 at 300\textdegree{}K and varies as T-4. The capture in this case occurs through the gold acceptor level.},
file = {/home/arch/Zotero/storage/4L5H7I5V/1958_Recombination_Properties_of.pdf},
journal = {Physical Review},
keywords = {gold,InDatabase,lifetime spectroscopy,silicon},
number = {6}
}
@article{benton1982,
title = {Capacitance {{Transient Spectroscopy}} of {{Trace Contamination}} in {{Silicon}}},
author = {Benton, J. L. and Kimerling, L. C.},
year = {1982},
volume = {129},
pages = {2098--2102},
issn = {0013-4651, 1945-7111},
doi = {10.1149/1.2124387},
abstract = {Capacitance transient spectroscopy is applied to the study of trace contamination in semiconductor devices. The introduction of electrically active, process-related defects in concentrations {$\geq$}1010 cm-3 is examined. Impurities are identified by correlation of the generated spectra with reference tables. The technique is effective in examining finished devices as well as in analyzing individual manufacturing steps.},
file = {/home/arch/Zotero/storage/AEY4Q6PX/1982_Capacitance_Transient.pdf;/home/arch/Zotero/storage/BVSKXL9Y/2098.html},
journal = {Journal of The Electrochemical Society},
keywords = {capacitance measurement,deep level transient spectroscopy,defects in semiconductors,InDatabase,semiconductor device measurement,silicon},
language = {en},
number = {9}
}
@article{benton1999,
title = {Behavior of {{Molybdenum}} in {{Silicon Evaluated}} for {{Integrated Circuit Processing}}},
author = {Benton, J. L. and Jacobson, D. C. and Jackson, B. and Johnson, J. A. and Boone, T. and Eaglesham, D. J. and Stevie, F. A. and Becerro, J.},
year = {1999},
volume = {146},
pages = {1929--1933},
issn = {0013-4651, 1945-7111},
doi = {10.1149/1.1391868},
abstract = {Mo is introduced into Si integrated circuits inadvertently during processing, often during Si epitaxial growth, high temperature furnace treatments, or ion implantation. Quantitative secondary ion mass spectrometry measurement of Mo concentrations in Si introduced by implantation is complicated by mass aliasing of and and by unexpected isotope ratios. Employing deep level transient spectroscopy depth profiling of implanted Mo in Si, we determine for the first time the diffusivity of Mo in Si, . We observe soluble Mo in Si at concentrations as high as , but present evidence that the solubility of Mo in Si is mediated by crystal defects and proximity of the surface. Mo does reduce carrier lifetime in Si, although it is not as an effective recombination center as Fe in Si. And in addition, Mo is not gettered to either epitaxial substrates or by high energy B implantation. Process engineers and circuit designers can expect little effect of Mo contamination on metal oxide semiconductor devices but can assume that trace Mo contamination may cause leakage current in bipolar devices. \textcopyright{} 1999 The Electrochemical Society. All rights reserved.},
file = {/home/arch/Zotero/storage/EX7XT4AC/1999_Behavior_of_Molybdenum_in.pdf;/home/arch/Zotero/storage/Y9X5QTV6/1929.html},
journal = {Journal of The Electrochemical Society},
keywords = {ToGoInDatabase},
language = {en},
number = {5}
}
@article{birkholz2005,
title = {Electronic Properties of Iron-Boron Pairs in Crystalline Silicon by Temperature- and Injection-Level-Dependent Lifetime Measurements},
author = {Birkholz, Jens E. and Bothe, Karsten and Macdonald, Daniel and Schmidt, Jan},
year = {2005},
volume = {97},
pages = {103708},
issn = {0021-8979, 1089-7550},
doi = {10.1063/1.1897489},
file = {/home/arch/Zotero/storage/7S5CM5C2/2005_Electronic_properties_of.pdf},
journal = {Journal of Applied Physics},
keywords = {defects in semiconductors,injection dependent lifetime,iron boron,silicon,temperature dependent lifetime},
language = {en},
number = {10}
}
@article{brotherton1978,
title = {The Electron Capture Cross Section and Energy Level of the Gold Acceptor Center in Silicon},
author = {Brotherton, S. D. and Bicknell, J.},
year = {1978},
volume = {49},
pages = {667--671},
issn = {0021-8979},
doi = {10.1063/1.324641},
file = {/home/arch/Zotero/storage/XNFA7NU5/1978The_electron_capture_cross.pdf},
journal = {Journal of Applied Physics},
keywords = {DLTS,gold,InDatabase},
number = {2}
}
@article{brotherton1980,
title = {Electron and {{Hole Capture}} at {{Au}} and {{Pt Centers}} in {{Silicon}}},
author = {Brotherton, S. D. and Lowther, J. E.},
year = {1980},
volume = {44},
pages = {606--609},
doi = {10.1103/PhysRevLett.44.606},
abstract = {Emission rates and hole-capture cross sections for the Au donor center in silicon are reported and from entropy considerations this center is shown to be similar in behavior to the Pt donor center. In contrast, the gold and platinum acceptor states display significantly different entropy changes on electron emission. A similar chemical structure for both these defects is proposed which is then used to interpret differences in electron emission behavior from the acceptor forms of the two defects.},
file = {/home/arch/Zotero/storage/9P32T5A5/1980_Electron_and_Hole_Capture_at.pdf;/home/arch/Zotero/storage/7LWJEB75/PhysRevLett.44.html},
journal = {Physical Review Letters},
number = {9}
}
@article{brotherton1982,
title = {Defect Production and Lifetime Control in Electron and {$\Gamma$}-irradiated Silicon},
author = {Brotherton, S. D. and Bradley, P.},
year = {1982},
volume = {53},
pages = {5720--5732},
issn = {0021-8979},
doi = {10.1063/1.331460},
file = {/home/arch/Zotero/storage/92MVM2LS/1982_Defect_production_and.pdf;/home/arch/Zotero/storage/CFEKU9IK/1.html},
journal = {Journal of Applied Physics},
keywords = {A-center (SiO_v),DLTS,E center (SiP_v),FZ,InDatabase,irridation,vacancies},
number = {8}
}
@article{brotherton1983,
title = {Photoionization Cross Section of Electron Irradiation Induced Levels in Silicon},
author = {Brotherton, S. D. and Parker, G. J. and Gill, A.},
year = {1983},
volume = {54},
pages = {5112--5116},
issn = {0021-8979},
doi = {10.1063/1.332732},
file = {/home/arch/Zotero/storage/45VZ7IJL/1983Photoionization_cross_section_of.pdf;/home/arch/Zotero/storage/WXGYR2EJ/1.html},
journal = {Journal of Applied Physics},
keywords = {optical capture cross sections,photocapacitance},
number = {9}
}
@article{brotherton1984,
title = {Electrical Observation of the {{Au}}-{{Fe}} Complex in Silicon},
author = {Brotherton, S. D. and Bradley, P. and Gill, A. and Weber, E. R.},
year = {1984},
volume = {55},
pages = {952--956},
issn = {0021-8979},
doi = {10.1063/1.333149},
file = {/home/arch/Zotero/storage/LIG3LBXW/1984Electrical_observation_of_the_Au‐Fe.pdf;/home/arch/Zotero/storage/7T9KBESP/1.html},
journal = {Journal of Applied Physics},
keywords = {DLTS,gold,InDatabase,iron},
number = {4}
}
@article{brotherton1985,
title = {Iron and the Iron-boron Complex in Silicon},
author = {Brotherton, S. D. and Bradley, P. and Gill, A.},
year = {1985},
volume = {57},
pages = {1941--1943},
issn = {0021-8979},
doi = {10.1063/1.335468},
file = {/home/arch/Zotero/storage/WAII2XWQ/1985_Iron_and_the_iron‐boron.pdf},
journal = {Journal of Applied Physics},
keywords = {defects in semiconductors,DLTS,InDatabase,iron},
number = {6}
}
@article{brotherton1987,
title = {Deep Levels of Copper in Silicon},
author = {Brotherton, S. D. and Ayres, J. R. and Gill, A. and {van Kesteren}, H.w. and Greidanus, F. J. a. M.},
year = {1987},
volume = {62},
pages = {1826--1832},
issn = {0021-8979},
doi = {10.1063/1.339564},
file = {/home/arch/Zotero/storage/ZXERRWDS/1987_Deep_levels_of_copper_in.pdf;/home/arch/Zotero/storage/5VJVQW23/1.html},
journal = {Journal of Applied Physics},
keywords = {copper,defects in semiconductors,DLTS,InDatabase,luminescence,silicon},
number = {5}
}
@article{carlson1956,
title = {Properties of {{Silicon Doped}} with {{Manganese}}},
author = {Carlson, R. O.},
year = {1956},
volume = {104},
pages = {937--941},
issn = {0031-899X},
doi = {10.1103/PhysRev.104.937},
file = {/home/arch/Zotero/storage/Q4EW3BQ2/1956_Properties_of_Silicon_Doped.pdf},
journal = {Physical Review},
keywords = {defects in semiconductors,hall coefficient,InDatabase,Manganese,silicon},
language = {en},
number = {4}
}
@article{carlson1957,
title = {Double-{{Acceptor Behavior}} of {{Zinc}} in {{Silicon}}},
author = {Carlson, R. O.},
year = {1957},
volume = {108},
pages = {1390--1393},
issn = {0031-899X},
doi = {10.1103/PhysRev.108.1390},
file = {/home/arch/Zotero/storage/2Q9US9Y6/1957_Double-Acceptor_Behavior_of.pdf},
journal = {Physical Review},
keywords = {defects in semiconductors,hall coefficient,silicon,zinc},
language = {en},
number = {6}
}
@article{chan1971,
title = {Defect {{Centers}} in {{Boron}}-{{Implanted Silicon}}},
author = {Chan, W. W. and Sah, C. T.},
year = {1971},
volume = {42},
pages = {4768--4773},
issn = {0021-8979},
doi = {10.1063/1.1659853},
file = {/home/arch/Zotero/storage/J3HNPGAQ/1971_Defect_Centers_in.pdf;/home/arch/Zotero/storage/53PZR5HX/1.html},
journal = {Journal of Applied Physics},
keywords = {boron,defects in semiconductors,DLTS,InDatabase,ion implantation},
number = {12}
}
@article{chantre1985,
title = {Metastable-Defect Behavior in Silicon: {{Charge}}-State-Controlled Reorientation of Iron-Aluminum Pairs},
shorttitle = {Metastable-Defect Behavior in Silicon},
author = {Chantre, Alain and Bois, Daniel},
year = {1985},
volume = {31},
pages = {7979--7988},
doi = {10.1103/PhysRevB.31.7979},
abstract = {We report the observation of a novel example of defect metastability in silicon. The phenomenon, monitored by deep-level transient spectroscopy, takes place at a well-identified point defect, i.e., the interstitial-iron\textendash{}substitutional-aluminum pair (Fe(i)Al(s)). The charge state of the defect during sample cooldown to low temperature is found to control a reversible transmutation behavior between two defect energy levels, at EV+0.20 eV (H1) and EV+0.13 eV (H2). A kinetic study of the transformation has led to a detailed microscopic description of the phenomenon. It is shown to arise from a charge-state-controlled, electrostatically driven, reorientation of Fe(i)Al(s) pairs between {$\langle$}111{$\rangle$} and {$\langle$}100{$\rangle$} configurations. Levels H1 and H2 are thus ascribed to (Fe(i))2+-(Fe(i))+ transitions at the nearest and next-nearest tetrahedral sites adjacent to aluminum, respectively. A configuration-coordinate (CC) description of the center, based on the simple ionic model of iron-acceptor pairs, is shown to account for all features of the reaction. No very large lattice relaxation is needed to understand the phenomenon. The CC model of the Fe(i)Al(s) pair is then extended to non-purely-ionic defect complexes. A complete new class of metastable centers is thus proposed. Metastable phenomena involving other semiconductor defects (A center in silicon, EL2 center in GaAs, M center in InP) are discussed in the light of these new CC models.},
file = {/home/arch/Zotero/storage/TMLNV7A3/1985_Metastable-defect_behavior_in.pdf;/home/arch/Zotero/storage/EUD5LB7N/PhysRevB.31.html},
journal = {Physical Review B},
keywords = {aluminium boron,defects in semiconductors,InDatabase,silicon,transition metals},
number = {12}
}
@article{chantre1985a,
title = {Configurationally Bistable {{C}} Center in Quenched {{Si}}:{{B}}: {{Possibility}} of a Boron-Vacancy Pair},
shorttitle = {Configurationally Bistable {{C}} Center in Quenched {{Si}}},
author = {Chantre, Alain},
year = {1985},
volume = {32},
pages = {3687--3694},
doi = {10.1103/PhysRevB.32.3687},
abstract = {The C center is an unusual defect found in ultra-fast-quenched (cw laser irradiated) boron-doped silicon. This center introduces two deep donor-hole traps in the band gap, at EV+0.50 eV (H1) and EV+0.36 eV (H2), as revealed by deep-level transient spectroscopy (DLTS). We find that each C center may contribute to either of the two hole-emission signals H1 and H2 in a DLTS scan, but not both, and that the one it contributes to depends upon its charge state during sample cooling down to low temperatures. We present a simple double-site configuration-coordinate model of the defect that explains these unusual observations. In this model, the C center can exist in either of two configurations in both of its charge states; each configuration is stable in one charge state. No very large lattice relaxation effect is involved. The C center is then tentatively identified as a boron-vacancy pair (B-V), a defect which has eluded DLTS detection so far. We show how this microscopic model is supported by the results of previous defect studies in ultra-fast-quenched and electron-irradiated silicon. The two donor levels H1 and H2 are thus tentatively ascribed to next-nearest- and nearest-neighbor B-V pairs, respectively.},
file = {/home/arch/Zotero/storage/F7H4L4G7/1985_Configurationally_bistable_C.pdf;/home/arch/Zotero/storage/STI5HDXX/PhysRevB.32.html},
journal = {Physical Review B},
keywords = {Boron vacancy,defects in semiconductors,DLTS,InDatabase,silicon},
number = {6}
}
@article{chantre1987,
title = {Metastable Thermal Donor States in Silicon},
author = {Chantre, Alain},
year = {1987},
volume = {50},
pages = {1500--1502},
issn = {0003-6951},
doi = {10.1063/1.97812},
file = {/home/arch/Zotero/storage/PK3CL486/1987_Metastable_thermal_donor.pdf;/home/arch/Zotero/storage/424VEM35/1.html},
journal = {Applied Physics Letters},
keywords = {oxygen,silicon,thermal donor},
number = {21}
}
@article{chen1979,
title = {Titanium in Silicon as a Deep Level Impurity},
author = {Chen, J. -W. and Milnes, A. G. and Rohatgi, A.},
year = {1979},
volume = {22},
pages = {801--808},
issn = {0038-1101},
doi = {10.1016/0038-1101(79)90130-8},
abstract = {Titanium inserted in silicon by diffusion or during Czochralski ingot growth is electrically active to a concentration level of about 4 \texttimes{} 1014 cm-3. Hall measurements after diffusion show conversion of lightly doped p type Si to n type due to a Ti donor level at EC - 0.22 eV. In DLTS measurements of n+p structures this level shows as an electron (minority carrier) trap at EC - 0.26 eV with an electron capture cross section of about 3 \texttimes{} 10-15 cm2 at 300\textdegree{}K. The DLTS curves also reveal a hole trap in the p type material. The ep (300/T)2 activation plot gives the level as EV + 0.29 eV. The hole capture cross section is about 1.7 \texttimes{} 10-17 cm2 at 300\textdegree{}K and decreases with decreasing temperature and the corrected trap level becomes EV = 0.26 eV. Ti in lightly doped (360 ohm-cm) n type material does not result in conversion to p type so this level is inferred also to be a donor. A Ti electrically active concentration of about 1.35 \texttimes{} 1013 cm-3 in p type (NA = 3.35 \texttimes{} 1015cm-3) Si results in a minority carrier (electron) lifetime of 50 nsec at 300\textdegree{}K.},
file = {/home/arch/Zotero/storage/VAXFTZKN/1979_Titanium_in_silicon_as_a_deep.pdf;/home/arch/Zotero/storage/6GUBHZJL/0038110179901308.html},
journal = {Solid-State Electronics},
keywords = {carrier lifetime,defects in semiconductors,DLTS,Hall,InDatabase,silicon,titanium},
number = {9}
}
@article{chen1980,
title = {Energy {{Levels}} in {{Silicon}}},
author = {Chen, J W and Milnes, A G},
year = {1980},
volume = {10},
pages = {157--228},
issn = {0084-6600},
doi = {10.1146/annurev.ms.10.080180.001105},
file = {/home/arch/Zotero/storage/HXUDFETB/1980_Energy_Levels_in_Silicon.pdf},
journal = {Annual Review of Materials Science},
keywords = {defects in semiconductors,review,silicon,ToGoInDatabase},
language = {en},
number = {1}
}
@article{chiavarotti1977,
title = {Characterisation of Properties of Nickel in Silicon Using Thermally Stimulated Capacitance Method},
author = {Chiavarotti, G. P. and Conti, M. and Messin, A.},
year = {1977},
volume = {20},
pages = {907--909},
issn = {0038-1101},
doi = {10.1016/0038-1101(77)90012-0},
abstract = {Detailed TSCAP measurements on silicon P+N and N+P diodes confirm the existence of two acceptor levels of nickel lying 0.21 {$\pm$} 0.01 and 0.41 {$\div$} 0.01 eV from the valence and conduction bands respectively. Concentration of these centers, their spatial distribution and behaviours after several annealing treatments are also presented.},
journal = {Solid-State Electronics},
keywords = {defects in semiconductors,DLTS,InDatabase,silicon,TSC},
number = {11}
}
@article{collins1957,
title = {Properties of {{Gold}}-{{Doped Silicon}}},
author = {Collins, C. B. and Carlson, R. O. and Gallagher, C. J.},
year = {1957},
volume = {105},
pages = {1168--1173},
doi = {10.1103/PhysRev.105.1168},
abstract = {Measurements of the temperature dependence of resistivity and Hall coefficient in gold-doped silicon show an acceptor level at 0.54 ev from the conduction band and a donor level at 0.35 ev from the valence band. These levels appear in equal concentrations within experimental error. The location of these levels is supported by photoconductivity measurements. A search was made for other levels associated with gold centers but none were found. The distribution coefficient for gold in silicon is 2.5\texttimes{}10-5. Gold was introduced into the crystals by growing from a gold-doped melt and by diffusion into single crystals at high temperatures. The concentrations of gold observed in solution after saturation at various temperatures is consistent with that expected from the distribution coefficient. Gold acts as a recombination center detectable at concentrations as low as 1012 per cm3. Because the acceptor level is so close to the center of the forbidden band, it is possible to shift the Fermi level below the middle with large ratios of gold to residual donors. The acceptor level is measured in p-type silicon as 0.62 ev from the valence band, giving a value of band gap consistent with previous measurements by other methods.},
file = {/home/arch/Zotero/storage/NFRFR9AX/1957_Properties_of_Gold-Doped.pdf},
journal = {Physical Review},
keywords = {defects in semiconductors,gold,hall coefficient,silicon},
number = {4}
}
@article{collins1957a,
title = {Properties of {{Silicon Doped}} with {{Iron}} or {{Copper}}},
author = {Collins, C. B. and Carlson, R. O.},
year = {1957},
volume = {108},
pages = {1409--1414},
doi = {10.1103/PhysRev.108.1409},
abstract = {Iron introduces a donor level into silicon at 0.40 ev from the valence band observed both in crystals doped in the melt and in crystals into which iron was diffused at 1200\textdegree{}C. This level converts anomalously to a level 0.55 ev from the conduction band on standing at room temperature. The conversion is reversible in the range {$\sim$}70\textdegree{}-200\textdegree{}C; above 200\textdegree{}C, the electrical activity of iron irreversibly disappears. No evidence for acceptor action of iron was found. The electrically active solubility of iron, 1.5\texttimes{}1016 cm-3 at 1200\textdegree{}C, is higher than the radiotracer solubility but the former was measured in more rapidly quenched samples. The distribution coefficient is 8\texttimes{}10-6. Preferential trapping of electrons by iron centers was shown by Hall mobility measurements on optically-excited charge carriers. Lifetime studies by the photoconductive decay method indicated a larger capture cross section for electrons than for holes.},
file = {/home/arch/Zotero/storage/DEAHZDSS/1957_Properties_of_Silicon_Doped.pdf},
journal = {Physical Review},
keywords = {Cu,defects in semiconductors,Fe,hall coefficient,silicon},
number = {6}
}
@article{conzelmann1983,
title = {Chromium and Chromium-Boron Pairs in Silicon},
author = {Conzelmann, H. and Graff, K. and Weber, E. R.},
year = {1983},
volume = {30},
pages = {169--175},
doi = {10.1007/BF00620536},
file = {/home/arch/Zotero/storage/DRRSD4BK/1983_Chromium_and_chromium-boron.pdf},
journal = {Applied Physics A Solids and Surfaces},
keywords = {DLTS,EPR,luminescence,neutron activation analysis},
number = {3}
}
@article{cox2014,
title = {Detection of a {{Molybdenum Acceptor Level}} in {{N}}-{{Type Silicon}}},
author = {Cox, Steven M.},
year = {2014},
volume = {3},
pages = {P397-P402},
issn = {2162-8769, 2162-8777},
doi = {10.1149/2.0081412jss},
abstract = {The detection of Mo in n-type Si has been reported in only a few references. An unidentified peak was detected in an n-type epitaxial layer by DLTS with an activation energy and capture cross-section of 0.255 eV and 3.5 \texttimes{} 10-16 cm2, respectively. These results were consistent with measurements of n-type silicon implanted with Mo. A p-type epitaxial wafer was exposed to the same epitaxial growth environment resulting in the detection of the Mo-d level, thus confirming the Mo contamination. The change in the enthalpy of the capture of electrons into the unidentified level was 14 meV resulting in the majority carrier capture cross-section being determined to be 1.2 \texttimes{} 10-16 cm2 assuming a multi-phonon process. Using the activation energy and enthalpy change of capture cross-section data, the change in Gibbs free energy as a function of temperature was calculated to be Ec-0.269 eV. Poole-Frenkel effect measurements determined the deep level to be an acceptor-like state. The total change in entropy was determined to be 1k, the first reported total entropy change for an acceptor level of a 4d transition metal. The measured enthalpy energy was in reasonable agreement with the reported theoretical calculation of a substitution Mo-a deep level.},
file = {/home/arch/Zotero/storage/SP7V9JPL/2014_Detection_of_a_Molybdenum.pdf;/home/arch/Zotero/storage/2DR8573E/P397.html},
journal = {ECS Journal of Solid State Science and Technology},
language = {en},
number = {12}
}
@article{czaputa1983,
title = {Energy Levels of Interstitial Manganese in Silicon},
author = {Czaputa, R. and Feichtinger, H. and Oswald, J.},
year = {1983},
volume = {47},
pages = {223--226},
issn = {00381098},
doi = {10.1016/0038-1098(83)90549-5},
file = {/home/arch/Zotero/storage/E3V9GIC7/1983_Energy_levels_of_interstitial.pdf},
journal = {Solid State Communications},
keywords = {defects in semiconductors,InDatabase,manganese,silicon},
language = {en},
number = {4}
}
@article{davis1959,
title = {Lifetimes and {{Capture Cross Sections}} in {{Gold}}-{{Doped Silicon}}},
author = {Davis, W. D.},
year = {1959},
volume = {114},
pages = {1006--1008},
doi = {10.1103/PhysRev.114.1006},
abstract = {The free lifetimes of electrons and holes in gold-doped silicon were determined by applying an electric field and measuring the amplitude of the pulses produced by {$\alpha$}-particles. Knowing the impurity concentrations and assuming that the lifetimes is determined primarily by capture at the gold-sites, the cross sections for capture were calculated. The value for either electrons or holes at neutral gold sites is 2\texttimes{}10-15 cm2 and at oppositely-charged sites, 1\texttimes{}10-13 cm2.},
file = {/home/arch/Zotero/storage/LXTVHMXB/1959_Lifetimes_and_Capture_Cross.pdf;/home/arch/Zotero/storage/4KMRS4U5/PhysRev.114.html},
journal = {Physical Review},
number = {4}
}
@article{davis1980,
title = {Impurities in Silicon Solar Cells},
author = {Davis, J. R. and Rohatgi, A. and Hopkins, R. H. and Blais, P. D. and {Rai-Choudhury}, P. and McCormick, J. R. and Mollenkopf, H. C.},
year = {1980},
volume = {27},
pages = {677--687},
issn = {0018-9383},
doi = {10.1109/T-ED.1980.19922},
abstract = {The effects of various metallic impurities, both singly and in combinations, on the performance of silicon solar cells have been studied. Czochralski crystals were grown with controlled additions of secondary impurities. The primary dopants were boron and phosphorus while the secondaires were: A1, B, C, Ca, Co, Cr, Cu, Fe, Mg, Mn, Mo, Nb, P, Pd, Ta, Ti, V, W, Zn, and Zr. Impurity concentrations ranged from 1010to 1017/cm3. Solar cells were made using a conventional diffusion process and were characterized by computer reduction ofI-Vdata. The collected data indicated that impurity-induced performance loss was primarily due to reduction of the base diffusion length. Based on this observation, an analytic model was developed which predicts cell performance as a function of the secondary impurity concentrations. The calculated performance parameters are in good agreement with measured values except for Cu, Ni, and Fe, which at higher concentrations, degrade the cell substantially by means of junction mechanisms. This behavior can be distinguished from base diffusion length effects by careful analysis of theI-Vdata. The effects of impurities in n-base and p-base devices differ in degree but submit to the same modeling analysis. A comparison of calculated and measured performance for multiple impurities indicates a limited interaction between impurities, e.g., copper appears to improve titanium-doped cells.},
file = {/home/arch/Zotero/storage/QUNQVQSF/1980_Impurities_in_silicon_solar.pdf;/home/arch/Zotero/storage/ICM779DP/1480715.html},
journal = {IEEE Transactions on Electron Devices},
keywords = {defects in semiconductors,diffusivity,InDatabase,segragation coefficient,Si,Solar cells},
number = {4}
}
@article{deixler1998,
title = {Laplace-Transform Deep-Level Transient Spectroscopy Studies of the {{G4}} Gold\textendash{}Hydrogen Complex in Silicon},
author = {Deixler, P. and Terry, J. and Hawkins, I. D. and {Evans-Freeman}, J. H. and Peaker, A. R. and Rubaldo, L. and Maude, D. K. and Portal, J.-C. and Dobaczewski, L. and Bonde Nielsen, K. and Nylandsted Larsen, A. and Mesli, A.},
year = {1998},
volume = {73},
pages = {3126--3128},
issn = {0003-6951},
doi = {10.1063/1.122694},
file = {/home/arch/Zotero/storage/HQZGXC8K/1998_Laplace-transform_deep-level.pdf;/home/arch/Zotero/storage/X9Q749BB/1.html},
journal = {Applied Physics Letters},
keywords = {gold,gold hydrogen,InDatabase},
number = {21}
}
@inproceedings{diez2005,
title = {Analysing Defects in Silicon by Temperature- and Injection-Dependent Lifetime Spectroscopy ({{T}}-{{IDLS}})},
booktitle = {20th {{European Photovoltaic Solar Energy Conference}} 2005},
author = {Diez, S. and Rein, S. and Glunz, S. W.},
year = {2005},
pages = {1216--1219},
file = {/home/arch/Zotero/storage/7UPMSG8T/2005Analysing_defects_in_silicon_by.pdf;/home/arch/Zotero/storage/YCS7ZWXI/N-50177.html},
isbn = {3-936338-20-5},
keywords = {defects in semiconductors,InDatabase,LS-I,LS-T,silicon,tungsten}
}
@article{diez2007,
title = {Cobalt Related Defect Levels in Silicon Analyzed by Temperature- and Injection-Dependent Lifetime Spectroscopy},
author = {Diez, S. and Rein, S. and Roth, T. and Glunz, S. W.},
year = {2007},
volume = {101},
pages = {033710},
issn = {0021-8979},
doi = {10.1063/1.2433743},
file = {/home/arch/Zotero/storage/KES2C5TM/2007_Cobalt_related_defect_levels.pdf;/home/arch/Zotero/storage/58NG88NR/1.html},
journal = {Journal of Applied Physics},
number = {3}
}
@article{engstrom1975,
title = {Thermal Activation Energy of the Gold-acceptor Level in Silicon},
author = {Engstr{\"o}m, O. and Grimmeiss, H. G.},
year = {1975},
volume = {46},
pages = {831--837},
issn = {0021-8979},
doi = {10.1063/1.321653},
file = {/home/arch/Zotero/storage/TLLAIXDZ/1975Thermal_activation_energy_of_the.pdf;/home/arch/Zotero/storage/WF7SGGPG/1975Thermal_activation_energy_of_the.pdf;/home/arch/Zotero/storage/JYGGDI7I/1.html;/home/arch/Zotero/storage/ZQ7CDF4K/1.html},
journal = {Journal of Applied Physics},
keywords = {defects in semiconductors,DLTS,InDatabase,silicon},
number = {2}
}
@article{evwaraye1977,
title = {Annealing of Irradiation-induced Defects in Arsenic-doped Silicon},
author = {Evwaraye, A. O.},
year = {1977},
volume = {48},
pages = {1840--1843},
issn = {0021-8979},
doi = {10.1063/1.323935},
file = {/home/arch/Zotero/storage/H8UVYT9K/1977_Annealing_of.pdf;/home/arch/Zotero/storage/VAQYPDFT/1.html},
journal = {Journal of Applied Physics},
keywords = {defects in semiconductors,DLTS,InDatabase,silicon},
number = {5}
}
@article{evwaraye1977a,
title = {The Defect Levels in P-type Silicon Doped with Manganese},
author = {Evwaraye, A. O.},
year = {1977},
volume = {48},
pages = {3813--3818},
issn = {0021-8979},
doi = {10.1063/1.324247},
file = {/home/arch/Zotero/storage/I7T2SX2Q/1977_The_defect_levels_in_p‐type.pdf;/home/arch/Zotero/storage/QM3VY4QH/1.html},
journal = {Journal of Applied Physics},
keywords = {ToGoInDatabase},
number = {9}
}
@article{evwaraye1978,
title = {Impurity States in Cobalt-Doped Silicon},
author = {Evwaraye, A. O.},
year = {1978},
volume = {7},
pages = {383--401},
issn = {1543-186X},
doi = {10.1007/BF02655644},
abstract = {Cobalt was diffused into p+ pn+ silicon structures at 900\textdegree{} and 1150\textdegree{}C for 2-4 hours followed by various quenching conditions. Four primary hole traps and two electron traps associated with cobalt in these devices were observed. The hole traps are labeled H1(Ev + 0.22 eV), H2(Ev + 0.29 eV), H3 (Ev + 0.40 eV) and H4(Ev + 0.45 eV) while the electron traps labeled E1 and E2 are located at Ec - 0.36 eV and Ec - 0.44 eV, respectively. The concentrations, thermal emission rates, and the capture cross sections for the majority carriers at these defects are reported. The behavior of these defects under heat treatment and the emergence of secondary defects, H5(Ev +0.22 eV) and H6 (Ev +0.34 eV), will be discussed.},
file = {/home/arch/Zotero/storage/HCCTVRB6/1978_Impurity_states_in.pdf},
journal = {Journal of Electronic Materials},
keywords = {DLTS,InDatabase,Irradiation-Induced Defects,Negative Photoconductivity,silicon,ToGoInDatabase},
language = {en},
number = {3}
}
@article{fairfield1965,
title = {Gold as a Recombination Centre in Silicon},
author = {Fairfield, J. M. and Gokhale, B. V.},
year = {1965},
volume = {8},
pages = {685--691},
issn = {0038-1101},
doi = {10.1016/0038-1101(65)90036-5},
abstract = {The recombination of holes and electrons through gold centres in silicon involves two recombination energy levels, a donor and an acceptor, and four capture probabilities. By comparing the low-level photoconductivity decay of gold-doped silicon samples with a theoretical expression derived from a transient solution of the recombination problem, we have determined the following values for these probabilities: Acceptor levelDonor level{$\alpha$}n = 1{$\cdot$}65 \texttimes{} 10-9 cm3/sec{$\beta$}n = 6{$\cdot$}3 \texttimes{} 10-8 cm3/sec{$\alpha$}p = 1{$\cdot$}15 \texttimes{} 10-7 cm3/sec{$\beta$}p = 2{$\cdot$}4 \texttimes{} 10-8 cm3/sec These results have been used to calculate, under high-level conditions, minority carrier lifetimes, which have then been compared with such lifetimes determined empirically from diode storage time measurements. Good agreement has been found, indicating that diode storage times can be successfully predicted.
R{\'e}sum{\'e}
La recombinaison des {\'e}lectrons et trous {\`a} travers les centres d'or dans le silicium comprend deux niveaux d'{\'e}nergie de recombinaison, un donneur et un accepteur et quatre probabilit{\'e}s de capture. En comparant la d{\'e}sint{\'e}gration photoconductive {\`a} niveaux bas d'{\'e}chantillons de silicium {\`a} dope d'or avec une expression th{\'e}orique deriv{\'e}e de la solution transitoire du probl{\`e}me de recombinaison, nous avons d{\'e}termin{\'e} les valeurs suivantes pour ces probabilit{\'e}s: Niveau d'accepteurNiveau de donneur{$\alpha$}n = 1,65 \texttimes{} 10-9 cm3/sec{$\beta$}n = 6,3 \texttimes{} 10-8 cm3/sec{$\alpha$}p = 1,15 \texttimes{} 10-7 cm3/sec{$\beta$}p = 2,4 \texttimes{} 10-8 cm3/sec Ces r{\'e}sultats ont {\'e}t{\'e} employ{\'e}s pour calculer, {\`a} r{\'e}gime de hauts niveaus, la dur{\'e}e de vie de porteurs minoritaires qui ont {\'e}t{\'e} ensuite compar{\'e}es avec des dur{\'e}es de vie d{\'e}termin{\'e}es empiriquement des mesures des temps d'emmagasisnement des diodes. Un bon accord a {\'e}t{\'e} trouv{\'e} indiquant que les temps d'emmagasinement peuvent {\^e}tre pr{\'e}dits correctement.
Zusammenfassung
Die Rekombination von L{\"o}chern und Elektronen durch Goldzentren in Silizium ist bestimmt durch zwei Rekombinations-Energieniveaus, n{\"a}mlich einen Donator und einen Akzeptor, sowie vier Einfangwahrscheinlichkeiten. Durch Vergleichen des Abklingens der Photoleitf{\"a}higkeit bei kleiner Tr{\"a}gerkonzentration in golddotierten Siliziumproben mit einem theoretischen Ausdruck, der von einer nichstation{\"a}ren L{\"o}sung des Rekombinationsproblems abgeleitet wurde, haben wir folgende Werte f{\"u}r diese Wahrscheinlichkeiten bestimmt: AkzeptorniveauDonatorniveau{$\alpha$}n = 1,65 \texttimes{} 10-9cm3/sec{$\beta$}n = 6,3 \texttimes{} 10-8cm3/sec{$\alpha$}p = 1,15 \texttimes{} 10-7cm3/sec{$\beta$}p = 2,4 \texttimes{} 10-8cm3/sec Diese Ergebnisse wurden benutzt, um bei grosser Tr{\"a}gerkonzentration die Lebensdauer von Minorit{\"a}tstr{\"a}gern zu ermitteln, die dann mit den Lebensdauern verglichen wurden, die empirisch aus Messungen der Dioden-Speicherzeit bestimmt wurden. Es wurde eine gute {\"U}bereinstimmung gefunden, die beweist, dass die Speicherzeit von Dioden mit Erfolg vorhergesagt werden kann.},
file = {/home/arch/Zotero/storage/Z4UB962T/1965_Gold_as_a_recombination.pdf},
journal = {Solid-State Electronics},
keywords = {gold,InDatabase,silicon},
number = {8}
}
@article{fan1956,
title = {Infra-Red {{Absorption}} in {{Semiconductors}}},
author = {Fan, H. Y.},
year = {1956},
volume = {19},
pages = {107},
issn = {0034-4885},
doi = {10.1088/0034-4885/19/1/304},
abstract = {Infra-red absorption in semiconductors is classified into four different types according to the mechanism: (i) intrinsic absorption associated with electron excitation across the energy gap; (ii) absorption due to the presence of free carriers; (iii) absorption associated with impurities or lattice defects; and (iv) absorption associated with lattice vibration. A general introduction is followed by some theoretical discussions. Electron excitation between different energy bands is discussed with emphasis on the intrinsic absorption edge. For the absorption by free carriers, the effects of electron scattering by lattice vibration and by impurity centres are considered. Absorption associated with localized electronic states is briefly discussed. Experimental results are discussed for four different semiconductors: germanium, silicon, indium antimonide, and tellurium. All four types of absorption have been investigated to some extent for germanium and silicon. The work done on these materials provides a pattern for infra-red studies on semiconductors. The absorption edge in indium antimonide is affected by the carrier concentration. Long wave-length absorption shows interesting behaviour, and the observed effects attributed to lattice vibration have provided information regarding the type of binding in the crystal. Tellurium, having an optical axis, is doubly refracting. Both the absorption edge and the absorption associated with free carriers depend on the direction of polarization of the radiation.},
file = {/home/arch/Zotero/storage/53H6CU3Y/1956_Infra-red_Absorption_in.pdf},
journal = {Reports on Progress in Physics},
keywords = {photon,ToGoInDatabase},
language = {en},
number = {1}
}
@article{feichtinger1981,
title = {Energy Levels and Solubility of Interstitial Chromium in Silicon},
author = {Feichtinger, H. and Czaputa, R.},
year = {1981},
volume = {39},
pages = {706--708},
issn = {0003-6951},
doi = {10.1063/1.92856},
file = {/home/arch/Zotero/storage/EQG4IM25/1981Energy_levels_and_solubility.pdf;/home/arch/Zotero/storage/KHAKR8KM/1.html},
journal = {Applied Physics Letters},
keywords = {chromium,defects in semiconductors,EPR,Hall,silicon,solubility},
number = {9}
}
@article{gao1991,
title = {Annealing and Profile of Interstitial Iron in Boron-doped Silicon},
author = {Gao, X. and Mollenkopf, H. and Yee, S.},
year = {1991},
volume = {59},
pages = {2133--2135},
issn = {0003-6951},
doi = {10.1063/1.106103},
file = {/home/arch/Zotero/storage/KAGXYTPI/1991Annealing_and_profile_of.pdf;/home/arch/Zotero/storage/4XVM56PH/1.html},
journal = {Applied Physics Letters},
keywords = {defects in semiconductors,DLTS,InDatabase,iron,silicon},
number = {17}
}
@article{gerson1977,
title = {A Quenched-in Defect in Boron-doped Silicon},
author = {Gerson, J. D. and Cheng, L. J. and Corbett, J. W.},
year = {1977},
volume = {48},
pages = {4821--4822},
issn = {0021-8979},
doi = {10.1063/1.323505},
file = {/home/arch/Zotero/storage/JSGVSAQ8/1977_A_quenched‐in_defect_in.pdf;/home/arch/Zotero/storage/699AHKC4/1.html},
journal = {Journal of Applied Physics},
keywords = {DLTS,FeB},
number = {11}
}
@article{glmiller1977,
title = {Capacitance {{Transient Spectroscopy}}},
author = {G L Miller and D V Lang and Kimerling, {and} L. C.},
year = {1977},
volume = {7},
pages = {377--448},
doi = {10.1146/annurev.ms.07.080177.002113},
file = {/home/arch/Zotero/storage/PIM9U8QB/1977_Capacitance_Transient.pdf},
journal = {Annual Review of Materials Science},
keywords = {DLTS,GaAs,InDatabase,review,Si,vacancies},
number = {1}
}
@article{graff1981,
title = {The {{Properties}} of {{Iron}} in {{Silicon}}},
author = {Graff, K. and Pieper, H.},
year = {1981},
volume = {128},
pages = {669--674},
issn = {0013-4651, 1945-7111},
doi = {10.1149/1.2127478},
abstract = {The properties of iron in n-type and p-type silicon were studied by means of DLTS, carrier lifetime measurements, and infrared absorption spectroscopy. Only one donor level was observed, situated at and correlated to iron on an interstitial site. In p-Si:B iron-boron pairs were formed at room temperature. Their activation energy was determined to be . The reaction proceeded in two phases. In the second phase a thermal equilibrium between iron and iron-boron pairs was found which could be shifted by annealing and illuminating the specimen, respectively. In aluminum-doped silicon crystals two levels were observed after iron diffusion correlated to iron-aluminum pairs. Their activation energies were determined to be . It is assumed that iron-boron pairs form also two levels, a donor and an acceptor. The acceptor must be situated in the upper half of the silicon bandgap. Reaction mechanisms are discussed.},
file = {/home/arch/Zotero/storage/2AWIYBEM/1981_The_Properties_of_Iron_in.pdf;/home/arch/Zotero/storage/68IN34BV/669.html},
journal = {Journal of The Electrochemical Society},
keywords = {carrier lifetime,defects in semiconductors,DLTS,haze,InDatabase,infrared spectra,iron‐aluminum pairs,iron‐boron pairs,room temperature impurity reactions,silicon},
language = {en},
number = {3}
}
@inproceedings{graff1981a,
title = {The Behavior of Transition and Nobe Metals in Silicon Crystals},
booktitle = {Semiconductor {{Silicon}} 1981},
author = {Graff, K. and {H. Pieper}},
year = {1981},
pages = {331--343},
publisher = {{The Electrochemical Society}},
address = {{Minneapolis}},
issn = {0091-391X},
abstract = {The 3d transition metals from Ti to Ni and the noble
metals Cu, Ag, Au were diffused intentionally into si
licon crystals. The precipitation of the elements at the
surface of the wafer was examined and DLTS spectra
were recorded. The concentration of electrically active
defects due to the transition metals diffused at a certain
temperature increased with increasing atomic numbers.
In Ti-, V-, and Mn-doped silicon three deep levels of
equal concentrations were found which were explained
as different charge states. Cr, Fe , Ni and Cu formed
only one donor in silicon. Their activation energies de
creased with increasing atomic number. Ag and Au formed
two levels after diffusion into silicon. Measured majority
carrier cross -sections of the various transition metals
showed a functional dependence on the respective activation
energies for equal charge states. Room temperature reac
tions were observed in Fe- and Cr-doped specimens.},
lccn = {TK 7871-85-1638 1981}
}
@book{graff1995,
title = {Metal {{Impurities}} in {{Silicon}}-{{Device Fabrication}}},
author = {Graff, Klaus},
editor = {Queisser, Hans-Joachim and Gonser, U. and Osgood, R. M. and Panish, M. B. and Sakaki, H. and Lotsch, Helmut K. V.},
year = {1995},
volume = {24},
publisher = {{Springer Berlin Heidelberg}},
address = {{Berlin, Heidelberg}},
doi = {10.1007/978-3-642-97593-6},
file = {/home/arch/Zotero/storage/FH254BX9/1995Metal_Impurities_in_Silicon-Device.pdf},
isbn = {978-3-642-97595-0 978-3-642-97593-6},
series = {Springer {{Series}} in {{Materials Science}}}
}
@book{graff2000,
title = {Metal {{Impurities}} in {{Silicon}}-{{Device Fabrication}}},
author = {Graff, Klaus},
editor = {Hull, Robert and Osgood, R. M. and Sakaki, H. and Zunger, Alex},
year = {2000},
volume = {24},
publisher = {{Springer Berlin Heidelberg}},
address = {{Berlin, Heidelberg}},
doi = {10.1007/978-3-642-57121-3},
file = {/home/arch/Zotero/storage/IMHXETBE/2000Metal_Impurities_in_Silicon-Device.pdf},
isbn = {978-3-642-62965-5 978-3-642-57121-3},
series = {Springer {{Series}} in {{Materials Science}}}
}
@article{grimmeiss1980,
title = {Deep Sulfur-related Centers in Silicon},
author = {Grimmeiss, H. G. and Janz{\'e}n, E. and Skarstam, B.},
year = {1980},
volume = {51},
pages = {4212--4217},
issn = {0021-8979},
doi = {10.1063/1.328279},
file = {/home/arch/Zotero/storage/T8K35VZE/1980_Deep_sulfur‐related_centers.pdf;/home/arch/Zotero/storage/KRQ6HSGZ/1.html},
journal = {Journal of Applied Physics},
keywords = {defects in semiconductors,DLTS,InDatabase,silicon,sulfure},
number = {8}
}
@article{grimmeiss1980a,
title = {Electronic Properties of Selenium-doped Silicon},
author = {Grimmeiss, H. G. and Janz{\'e}n, E. and Skarstam, B.},
year = {1980},
volume = {51},
pages = {3740--3745},
issn = {0021-8979},
doi = {10.1063/1.328161},
file = {/home/arch/Zotero/storage/Q2NG6BJ8/1980Electronic_properties_of_selenium‐doped.pdf;/home/arch/Zotero/storage/RQP64YTK/1.html},
journal = {Journal of Applied Physics},
keywords = {defects in semiconductors,InDatabase,selenium},
number = {7}
}
@article{guldberg1977,
title = {Electron Trap Annealing in Neutron Transmutation Doped Silicon},
author = {Guldberg, J.},
year = {1977},
volume = {31},
pages = {578--579},
issn = {0003-6951},
doi = {10.1063/1.89785},
file = {/home/arch/Zotero/storage/TURM28IP/1977_Electron_trap_annealing_in.pdf;/home/arch/Zotero/storage/H2RTAQU2/1.html},
journal = {Applied Physics Letters},
keywords = {defects in semiconductors,InDatabase,irridation,silicon},
number = {9}
}
@article{gwozdz2019,
title = {Detection of {{Sulfur}}-{{Related Defects}} in {{Sulfur Diffused}} n- and p-{{Type Si}} by {{DLTS}}},
author = {Gwozdz, Katarzyna and Kolkovsky, Vladimir and Weber, Joerg and Yakovleva, Anastasia A. and Astrov, Yuri A.},
year = {2019},
volume = {216},
pages = {1900303},
issn = {1862-6319},
doi = {10.1002/pssa.201900303},
abstract = {Sulfur is diffused into Czochralski (CZ) and Float-Zone (FZ) silicon wafers at 1200 \textdegree{}C for 30 h. After diffusion, the wafers are slowly cooled in air. Several defect levels are observed by deep level transient spectroscopy (DLTS) in n- and p-type samples. All defects levels are related to sulfur defects, but none could be identified with the donor and double donor states of substitutional S or molecular S2. Additional annealing of the samples at 300 \textdegree{}C generates four DLTS levels in n-type Si and no peaks in p-type Si. The enhancement of the emission rate with the electrical field confirm their donor and double donor-like behavior. The authors identify the four DLTS levels in the annealed n-type Si samples with the different charge states of monoatomic S and molecular S2 (S0, S+, S20, and S2+) defects in Si. Hydrogenation of the annealed samples by wet chemical etching results in a reduction of the intensity of S0, S+, S20, and S2+ due to a passivation of these defects. The authors did not observe any electrically active SH-complexes in the hydrogenated samples.},
copyright = {\textcopyright{} 2019 WILEY-VCH Verlag GmbH \& Co. KGaA, Weinheim},
file = {/home/arch/Zotero/storage/9YQDZXMD/Gwozdz et al. - 2019 - Detection of Sulfur-Related Defects in Sulfur Diff.pdf;/home/arch/Zotero/storage/9EYGP5RH/pssa.html},
journal = {physica status solidi (a)},
keywords = {defects,DLTS,InDatabase,Laplace DLTS,silicon,sulfur},
language = {en},
number = {17}
}
@article{hamaguchi1991,
title = {Deep {{Levels Associated}} with {{Molybdenum}} in {{Silicon}}},
author = {Hamaguchi, Toshiaki and Hayamizu, Yoshinori},
year = {1991},
volume = {30},
pages = {L1837},
issn = {1347-4065},
doi = {10.1143/JJAP.30.L1837},
file = {/home/arch/Zotero/storage/7E4SZXET/1991_Deep_Levels_Associated_with.pdf;/home/arch/Zotero/storage/87KSQJ89/meta.html},
journal = {Japanese Journal of Applied Physics},
language = {en},
number = {11A}
}
@article{hangleiter1987,
title = {Nonradiative Recombination via Deep Impurity Levels in Silicon: {{Experiment}}},
shorttitle = {Nonradiative Recombination via Deep Impurity Levels in Silicon},
author = {Hangleiter, Andreas},
year = {1987},
volume = {35},
pages = {9149--9161},
issn = {0163-1829},
doi = {10.1103/PhysRevB.35.9149},
file = {/home/arch/Zotero/storage/LH5CK4TB/1987_Nonradiative_recombination.pdf},
journal = {Physical Review B},
language = {en},
number = {17}
}
@article{herman1972,
title = {Thermal Ionization Rates and Energies of Holes at the Double Acceptor Zinc Centers in Silicon},
author = {Herman, J. M. and Sah, C. T.},
year = {1972},
volume = {14},
pages = {405--415},
issn = {1521-396X},
doi = {10.1002/pssa.2210140203},
abstract = {The thermal emission rates and activation energies of holes trapped at the neutral and singly ionized zinc centers are measured using the dark capacitance and current transient techniques in n+\textendash{}p junctions. The thermal activation energies of holes from these centers are 316 and 617 meV, respectively. Detailed electric field dependences of the thermal emission rates are obtained using a differential bias voltage technique. The thermal emission rate of holes from neutral zinc centers exhibits a very large field dependence, while that from singly ionized zinc centers is small. A second zinc-related center, which is attributed to the previously reported acceptorlike, zinc\textendash{}-boron complex, is studied. The thermal activation energy of trapped holes from this center is 167 meV.},
copyright = {Copyright \textcopyright{} 1972 WILEY-VCH Verlag GmbH \& Co. KGaA},
file = {/home/arch/Zotero/storage/SDBE4G85/1972_Thermal_ionization_rates_and.pdf;/home/arch/Zotero/storage/A8CKCCJ6/pssa.html},
journal = {physica status solidi (a)},
keywords = {defects in semiconductors,DLTS,InDatabase,silicon,Thermal capture of electrons and holes at zinc centers in silicon},
language = {en},
number = {2}
}
@article{herring2001,
title = {Energy Levels of Isolated Interstitial Hydrogen in Silicon},
author = {Herring, Conyers and Johnson, N. M. and {Van de Walle}, Chris G.},
year = {2001},
volume = {64},
pages = {125209},
doi = {10.1103/PhysRevB.64.125209},
abstract = {This paper first describes the quantitative determination of the static and dynamic properties of the locally stable states of monatomic hydrogen dissolved in crystalline silicon: H+, H0, and H-. The monatomic hydrogens were created controllably near room temperature by using hole-stimulated dissociation of phosphorus-hydrogen (PH) complexes. Drift velocities and charge-change rates were studied via time-resolved capacitance-transient measurements in Schottky diodes under changes of bias. These data enable the donor level {$\varepsilon$}D of 2H to be located at {$\sim$}0.16 eV below the conduction band (confirming that the E3{${'}$} center found in proton-implanted Si corresponds to interstitial H in undamaged Si), and the acceptor level {$\varepsilon$}A at {$\sim$}0.07 eV below midgap, so that hydrogen is a ``negative-U'' system. The experimental values of {$\varepsilon$}D and {$\varepsilon$}A are consistent with predictions from first-principles calculations, which also provide detailed potential-energy surfaces for hydrogen in each charge state. While the phonon-mediated reaction H0\textrightarrow{}H++e- is fast, the reaction H-\textrightarrow{}H0+e- has an activation energy {$\sim$}0.84 eV, well above the energy difference ({$\sim$}0.47 eV) between initial and final states. Our experiments also yielded diffusion coefficients near room temperature for 1H+, 2H+, and 2H-. The asymmetrical positioning of {$\varepsilon$}D and {$\varepsilon$}A in the gap accounts for many previously unexplained effects. For example, it is shown to be responsible for the much greater difficulty of passivating phosphorus-doped than comparably boron-doped Si. And while modest hole concentrations dissociate PH complexes rapidly at temperatures where thermal dissociation takes years, we could not detect an analogous dissociation of BH complexes by minority electrons, a process that is expected to be frustrated by the rapid thermal ionization of H0. The distribution of hydrogen in n-on-n epitaxial layers hydrogenated at 300 \textdegree{}C can be accounted for if the donor-hydrogen complexes are in thermal equilibrium with H2 complexes whose binding energy (relative to H++H-) is of the order of 1.75 eV. With this binding energy, the measured migration of H2 at 200 \textdegree{}C and below must be by diffusion without dissociation.},
file = {/home/arch/Zotero/storage/RVD6RXYH/2001_Energy_levels_of_isolated.pdf;/home/arch/Zotero/storage/NRW95JI8/PhysRevB.64.html},
journal = {Physical Review B},
number = {12}
}
@article{holm1991,
title = {Deep State of Hydrogen in Crystalline Silicon: {{Evidence}} for Metastability},
shorttitle = {Deep State of Hydrogen in Crystalline Silicon},
author = {Holm, B. and Bonde Nielsen, K. and Bech Nielsen, B.},
year = {1991},
volume = {66},
pages = {2360--2363},
issn = {0031-9007},
doi = {10.1103/PhysRevLett.66.2360},
file = {/home/arch/Zotero/storage/7G6VM7CP/1991_Deep_state_of_hydrogen_in.pdf},
journal = {Physical Review Letters},
keywords = {DLTS,hydrogen,interstital hydrogen,metastale},
language = {en},
number = {18}
}
@article{indusekhar1986,
title = {Investigation of {{Deep Defects Due}} to {$\alpha$}-{{Particle Irradiation}} in n-{{Silicon}}},
author = {Indusekhar, H. and Kumar, V. and Sengupta, D.},
year = {1986},
volume = {93},
pages = {645--653},
issn = {1521-396X},
doi = {10.1002/pssa.2210930230},
abstract = {Electrical properties of deep defects induced in n-silicon by {$\alpha$}-particles of about 10 MeV energy at a dose of 1014 and 1015 cm-2 are studied by DLTS. The levels at Ec -0.18 eV, Ec -0.26 eV, and Ec -0.48 eV are identified as A center, V2 (=/-) and V2 (-/0) on the basis of activation energy, electron capture cross section, and annealing behavior. Two other irradiation related levels at Ec -0.28 eV and Ec -0.51 eV could not be related to any known center.},
copyright = {Copyright \textcopyright{} 1986 WILEY-VCH Verlag GmbH \& Co. KGaA},
file = {/home/arch/Zotero/storage/F37F26FU/1986_Investigation_of_Deep_Defects.pdf;/home/arch/Zotero/storage/ADQ8YD3Y/pssa.html},
journal = {physica status solidi (a)},
keywords = {defects in semiconductors,DLTS,InDatabase,silicon},
language = {en},
number = {2}
}
@article{indusekhar1986a,
title = {Properties of Iron Related Quenched-in Levels in p-Silicon},
author = {Indusekhar, H. and Kumar, V.},
year = {1986},
volume = {95},
pages = {269--278},
issn = {1521-396X},
doi = {10.1002/pssa.2210950134},
abstract = {The electrical and optical properties of the thermally induced quenched-in levels in p-silicon which have heen attributed to iron are studied. The two levels, HI and H2, are located at Ev + 0.42 eV and Ev + 0.52 eV, respectively, as determined by TSCAP, DLTS, and transient photocapacitance methods. The photoionization cross sections are well described by Lucovsky's model. The hole capture by H1 is temperature dependent; a barrier of 40 meV is measured. However, multiphonon emission mechanism cannot be invoked to explain this temperature dependence due to the inferred zero lattice relaxation. The source of iron contamination is found to be the ambient conditions, in particular the quartz tube. The conflicting reports regarding the stability and the variation in the reported capture cross section values suggests that the observed Ev + 0.4 eV level must be a complex centre. The inferred near zero lattice relaxation during the electron transition implies weak coupling to the host lattice.},
copyright = {Copyright \textcopyright{} 1986 WILEY-VCH Verlag GmbH \& Co. KGaA},
file = {/home/arch/Zotero/storage/UJKDI6DR/1986Properties_of_iron_related_quenched-in.pdf;/home/arch/Zotero/storage/3NYSV5D9/pssa.html},
journal = {physica status solidi (a)},
keywords = {InDatabase,iron,optical capture cross sections},
language = {en},
number = {1}
}
@article{inglese2016,
title = {Recombination Activity of Light-Activated Copper Defects in p-Type Silicon Studied by Injection- and Temperature-Dependent Lifetime Spectroscopy},
author = {Inglese, Alessandro and Lindroos, Jeanette and Vahlman, Henri and Savin, Hele},
year = {2016},
volume = {120},
pages = {125703},
issn = {0021-8979},
doi = {10.1063/1.4963121},
abstract = {The presence of copper contamination is known to cause strong light-induced degradation (Cu-LID) in silicon. In this paper, we parametrize the recombination activity of light-activated copper defects in terms of Shockley\textemdash{}Read\textemdash{}Hall recombination statistics through injection- and temperature dependent lifetime spectroscopy (TDLS) performed on deliberately contaminated float zone silicon wafers. We obtain an accurate fit of the experimental data via two non-interacting energy levels, i.e., a deep recombination center featuring an energy level at Ec-Et=0.48-0.62\,eVEc-Et=0.48-0.62\,eV{$<$}math display="inline" overflow="scroll" altimg="eq-00001.gif"{$><$}mrow{$><$}msub{$><$}mrow{$><$}mi{$>$}E{$<$}/mi{$><$}/mrow{$><$}mrow{$><$}mi{$>$}c{$<$}/mi{$><$}/mrow{$><$}/msub{$><$}mo{$>-<$}/mo{$><$}msub{$><$}mrow{$><$}mi{$>$}E{$<$}/mi{$><$}/mrow{$><$}mrow{$><$}mi{$>$}t{$<$}/mi{$><$}/mrow{$><$}/msub{$><$}mo{$>$}={$<$}/mo{$><$}mn{$>$}0.48{$<$}/mn{$><$}mo{$>-<$}/mo{$><$}mn{$>$}0.62{$<$}/mn{$><$}mo{$>$}\,{$<$}/mo{$><$}mtext{$>$}eV{$<$}/mtext{$><$}/mrow{$><$}/math{$>$} with a moderate donor-like capture asymmetry (k=1.7-2.6)\,k=1.7-2.6)\,{$<$}math display="inline" overflow="scroll" altimg="eq-00002.gif"{$><$}mrow{$><$}mi{$>$}k{$<$}/mi{$><$}mo{$>$}={$<$}/mo{$><$}mn{$>$}1.7{$<$}/mn{$><$}mo{$>-<$}/mo{$><$}mn{$>$}2.6{$<$}/mn{$><$}mo stretchy="false"{$>$}){$<$}/mo{$><$}mo{$>$}\,{$<$}/mo{$><$}/mrow{$><$}/math{$>$} and an additional shallow energy state located at Ec-Et=0.1-0.2\,eVEc-Et=0.1-0.2\,eV{$<$}math display="inline" overflow="scroll" altimg="eq-00003.gif"{$><$}mrow{$><$}msub{$><$}mrow{$><$}mi{$>$}E{$<$}/mi{$><$}/mrow{$><$}mrow{$><$}mi{$>$}c{$<$}/mi{$><$}/mrow{$><$}/msub{$><$}mo{$>-<$}/mo{$><$}msub{$><$}mrow{$><$}mi{$>$}E{$<$}/mi{$><$}/mrow{$><$}mrow{$><$}mi{$>$}t{$<$}/mi{$><$}/mrow{$><$}/msub{$><$}mo{$>$}={$<$}/mo{$><$}mn{$>$}0.1{$<$}/mn{$><$}mo{$>-<$}/mo{$><$}mn{$>$}0.2{$<$}/mn{$><$}mo{$>$}\,{$<$}/mo{$><$}mtext{$>$}eV{$<$}/mtext{$><$}/mrow{$><$}/math{$>$}, which mostly affects the carrier lifetime only at high-injection conditions. Besides confirming these defect parameters, TDLS measurements also indicate a power-law temperature dependence of the capture cross sections associated with the deep energy state. Eventually, we compare these results with the available literature data, and we find that the formation of copper precipitates is the probable root cause behind Cu-LID.},
file = {/home/arch/Zotero/storage/Z588CMKG/Inglese et al. - 2016 - Recombination activity of light-activated copper d.pdf;/home/arch/Zotero/storage/YELN7EUQ/1.html},
journal = {Journal of Applied Physics},
keywords = {copper,defects in semiconductors,InDatabase,LS-IT,silicon},
number = {12}
}
@article{irmscher1984,
title = {Hydrogen-Related Deep Levels in Proton-Bombarded Silicon},
author = {Irmscher, K. and Klose, H. and Maass, K.},
year = {1984},
volume = {17},
pages = {6317--6329},
issn = {0022-3719},
doi = {10.1088/0022-3719/17/35/007},
file = {/home/arch/Zotero/storage/NGLNXAVB/1984_Hydrogen-related_deep_levels.pdf},
journal = {Journal of Physics C: Solid State Physics},
keywords = {defects in semiconductors,hydrogen,interstitial hydrogen,silicon},
language = {en},
number = {35}
}
@article{istratov1999,
title = {Iron and Its Complexes in Silicon},
author = {Istratov, A. A. and Hieslmair, H. and Weber, E. R.},
year = {1999},
volume = {69},
pages = {13--44},
issn = {0947-8396},
doi = {10.1007/s003390050968},
abstract = {This article is the first in a series of two reviews on the properties of iron in silicon. It offers a comprehensive summary of the current state of understanding of fundamental physical properties of iron and its complexes in silicon. The first section of this review discusses the position of iron in the silicon lattice and the electrical properties of interstitial iron. Updated expressions for the solubility and the diffusivity of iron in silicon are presented, and possible explanations for conflicting experimental data obtained by different groups are discussed. The second section of the article considers the electrical and the structural properties of complexes of interstitial iron with shallow accepters (boron, aluminum, indium, gallium, and thallium), shallow donors (phosphorus and arsenic) and other impurities (gold, silver, platinum, palladium, zinc, sulfur, oxygen, carbon, and hydrogen). Special attention is paid to the kinetics of iron pairing with shallow accepters, the dissociation of these pairs, and the metastability of iron-acceptor pairs. The parameters of iron-related defects in silicon are summarized in tables that include more than 30 complexes of iron as detected by electron paramagnetic resonance (EPR) and almost 20 energy levels in the band gap associated with iron. The data presented in this review illustrate the enormous complexing activity of iron, which is attributed to the partial or complete (depending on the temperature and the conductivity type) ionization of iron as well as the high diffusivity of iron in silicon. It is shown that studies of iron in silicon require exceptional cleanliness of experimental facilities and highly reproducible diffusion and temperature ramping (quenching) procedures. Properties of iron that are not yet completely understood and need further research are outlined.},
file = {/home/arch/Zotero/storage/HQZQL2D3/1999Iron_and_its_complexes_in.pdf},
journal = {Applied Physics A: Materials Science and Processing},
number = {1}
}
@article{jaraiz1986,
title = {Electron Thermal Emission Rates of Nickel Centers in Silicon},
author = {Jaraiz, M. and Due{\~n}as, S. and Vicente, J. and Bail{\'o}n, L. and Barbolla, J.},
year = {1986},
volume = {29},
pages = {883--884},
issn = {0038-1101},
doi = {10.1016/0038-1101(86)90008-0},
abstract = {The majority carrier thermal emission rates of nickel levels in the depletion region of reverse biased silicon p+ nn+ junctions have been investigated using the admittance spectroscopy technique. We have found two levels associated with nickel in n-type silicon. The ``thermal activation energies'' have values of EC - 360 {$\pm$} 10 meV and EC - 570 {$\pm$} 10 meV.},
file = {/home/arch/Zotero/storage/QSWIZ9EF/1986_Electron_thermal_emission.pdf;/home/arch/Zotero/storage/JIENRP8S/0038110186900080.html},
journal = {Solid-State Electronics},
keywords = {Admittance spectroscopy,defects in semiconductors,InDatabase,nickel,silicon},
number = {9}
}
@article{jellison1982,
title = {Transient Capacitance Studies of an Electron Trap at {{Ec}}-{{ET}} = 0.105 {{eV}} in Phosphorus-doped Silicon},
author = {Jellison, G. E.},
year = {1982},
volume = {53},
pages = {5715--5719},
issn = {0021-8979},
doi = {10.1063/1.331459},
file = {/home/arch/Zotero/storage/BQK8GTSQ/1982_Transient_capacitance_studies.pdf;/home/arch/Zotero/storage/HQUQGRXL/1.html},
journal = {Journal of Applied Physics},
keywords = {carbon-carbon defect,defects in silicon,DLTS,EPR,InDatabase},
number = {8}
}
@article{kimerling1976,
title = {New {{Developments}} in {{Defect Studies}} in {{Semiconductors}}},
author = {Kimerling, L. C.},
year = {1976},
volume = {23},
pages = {1497--1505},
issn = {0018-9499},
doi = {10.1109/TNS.1976.4328529},
abstract = {Not Available},
file = {/home/arch/Zotero/storage/3KHXJR7I/1976_New_Developments_in_Defect.pdf;/home/arch/Zotero/storage/7SUNJXW7/4328529.html},
journal = {IEEE Transactions on Nuclear Science},
keywords = {Capacitance,Instruments,Scanning electron microscopy,Schottky barriers,Signal processing,Solids,Spectroscopy,Temperature dependence,ToGoInDatabase,Transient analysis,Working environment noise},
number = {6}
}
@article{kimerling1981,
title = {Oxygen-related Donor States in Silicon},
author = {Kimerling, L. C. and Benton, J. L.},
year = {1981},
volume = {39},
pages = {410--412},
issn = {0003-6951},
doi = {10.1063/1.92755},
file = {/home/arch/Zotero/storage/Z2SFS4PJ/1981_Oxygen‐related_donor_states.pdf;/home/arch/Zotero/storage/38F6UYLI/1.html},
journal = {Applied Physics Letters},
keywords = {thermal donor,ToGoInDatabase},
number = {5}
}
@article{kimerling1985,
title = {Defect {{Structure}} and {{Properties}} by {{Junction Spectroscopy}}},
author = {Kimerling, L. C. and Benton, J. L. and Lee, K. M. and Stavola, M.},
year = {1985/ed},
volume = {46},
issn = {1946-4274, 0272-9172},
doi = {10.1557/PROC-46-1},
abstract = {The application of transient junction current and capacitance techniques to the study of imperfection in semiconductor materials is reviewed. An array of perturbation techniques are described which allow direct determination of electronic and atomic structure, as well as electrical and physical properties. The methods are illustrated with silicon materials studies of the divacancy using Polarized Excitation Photocapacitance, the oxygen donor using Stress and Electric Field Modulated DLTS, dislocations using spatially resolved DLTS, and iron impurities employing Charge State Control of Structure.},
file = {/home/arch/Zotero/storage/AVLYLGDX/1985_Defect_Structure_and.pdf;/home/arch/Zotero/storage/GQ7GPWEV/9A1A22C2FE539A346701561C0AB835C4.html},
journal = {MRS Online Proceedings Library Archive},
keywords = {defects in semiconductors,DLTS,InDatabase,silicon},
language = {en}
}
@article{kunio1983,
title = {Defect Levels in Chromium-Doped Silicon},
author = {Kunio, Takemitsu and Yamazaki, Tatsuya and Ohta, Eiji and Sakata, Makoto},
year = {1983},
volume = {26},
pages = {155--160},
issn = {0038-1101},
doi = {10.1016/0038-1101(83)90117-X},
abstract = {The transient capacitance technique has been used to study the chromium-related levels in the silicon band gap. Chromium was diffused at temperature of 1100 and 1150\textdegree{}C for 0.5 and 3 hr. Five different levels at Ec-0.11 eV, Ec-0.21 eV, Ec-0.28 eV, Ec-0.36 eV and Ec-0.45 eV were obtained from the Arrheniu plots of the electron thermal-emission rates. The number of levels in the upper half of the band gap decreased from five to two with an increase of Cr-diffusion period. Two levels were located at Ec-0.20 eV (donor) and Ec-0.43 eV (acceptor). A donor level was also observed at Ev + 0.25 eV. The donor level was not affected by the diffusion condition. The majority carrier capture cross sections of the three dominant levels have been measured by the transient capacitance technique modified by the pulse transformer. The values were {$\sigma$}n = 4.1 \texttimes{} 10-15 cm2 for the upper donor at Ec-0.20 eV, {$\sigma$}n = 2.0 \texttimes{} 10-16 cm2 for the acceptor at Ec -0.43 eV and {$\sigma$}p = 9.1 \texttimes{} 10-18 cm2 for the lower donor at Ev + 0.25 eV, and were independent of temperature. The three dominant levels are due to distinct chromium centers.},
file = {/home/arch/Zotero/storage/2UG2ZKQW/1983Defect_levels_in.pdf;/home/arch/Zotero/storage/VD9KZWHW/003811018390117X.html},